Silicon Nitride and Silicon Dioxide Thin Insulating Films VII

Silicon Nitride and Silicon Dioxide Thin Insulating Films VII

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19 shows an experimental verification of this principle ... 19b shows the correlation between the increase of the intrinsic gate oxide charge-to-breakdown, and the decrease of the ... Electrochemical Society Proceedings Volume 2003-02 445.


Title:Silicon Nitride and Silicon Dioxide Thin Insulating Films VII
Author: Ram Ekwal Sah
Publisher:The Electrochemical Society - 2003-01-01
ISBN-13:

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